Current

±1.05A

Power

22W

Voltage Resolution

1µV

Current Resolution

10pA

Source

DC Voltage

Output Voltage

±21V/ ±1.05A, ±210V/±105 mA

Current Limit

Min. 01% of rang

Programming Resolution

1µV, ±200.000mV range

10µV, ±2.00000V range

100µV, ±20.0000V range

1mV, ±200.000V range

Programming Accuracy 1

±(0.02%+600µV), ±200.000mV range

±(0.02%+600µV), ±2.00000V range

±(0.02%+2.4mV), ±20.0000V range

±(0.02%+24mV), ±200.000V range

Load Regulation

0.01% of range + 100µV

Line Regulation

0.01% of range

Overshoot

<0.1% typical (full scale step, resistive load,10mA range)

Recovery Time (1000%Load Change)

<250µs (within 0.1% plus load regulation errors, 1A and 100mA compliance.)

Ripple and Noise

4mV rms(20Hz~ 1MHz) 10mVpp(20Hz~ 1MHz)

Temperature Coefficient
(0°–18°C & 28°–50°C)

±(0.15 × accuracy specification)/°C

DC Current

Output Current

±1.05A /±21V, ±105 mA /±210V

Voltage Limit

Min. 0.1% of range

Programmed Source Resolution

10pA, ±1.00000µA range

100pA, ±10.0000µA range

1nA, ±100.000µA range

10nA, ±1.00000mA range

100nA, ±10.00000mA range

1µA, ±100.000mA range

10µA, ±1.00000A range

Programmed Source Accuracy 1

±(0.035%+600pA), ±1.00000µA range

±(0.033%+2nA), ±10.0000µA range

±(0.031%+20nA), ±100.000µA range

±(0.034%+200nA), ±1.00000mA range

±(0.045%+2µA), ±10.00000mA range

±(0.066%+20µA), ±100.000mA range

±(0.27%+900µA), ±1.00000A range

Load Regulation

0 0.01% of range + 100pA

Line Regulation

0.01% of range

Overshoot

<0.1% typical (1mA step, RL = 10kΩ, 20V range).

Temperature Coefficient
(0°–18°C & 28°–50°C)

±(0.15 × accuracy specification)/°C

General

Output Settling Time2

100µs typical Time

Output Rise Time (±30%)

300µs, 200V range, 100mA compliance.

150V/µs, 20V range, 100mA compliance.

DC Floating Voltage

Output can be floated up to ±250VDC

Remote Sense

Up to 1V drop per load lead.

Compliance Accuracy

Add 0.3% of range and ±0.02% of reading to base specification.

Range Change Overshoot 3

Adjacent range changes between 200mV, 2V and 20V ranges, 100mV typical.

Minimum Compliance Value

0.1% of range

Command Processing Time 4

Autorange On:10ms.Autorange Off:7ms.

Measurement

 Voltage

Input Resistance

>10 GΩ

Measurement Resolution

1µV, ±200.000mV range

10µV, ±2.00000V range

100µV, ±20.0000V range

1mV, ±200.000V range

Measurement Accuracy

±(0.012%+300µV), ±200.000mV range

±(0.012%+300µV), ±2.00000V range

±(0.015%+1.5mV), ±20.0000V range

±(0.015%+10mV), ±200.000V range

Temperature Coefficient
(0°–18°C & 28°–50°C)

±(0.15 × accuracy specification)/°C

Current

Voltage Burden (4-wire mode)

< 1mV

Programmed Source Resolution

10pA, ±1.00000µA range

100pA, ±10.0000µA range

1nA, ±100.000µA range

10nA, ±1.00000mA range

100nA, ±10.00000mA range

1µA, ±100.000mA range

10µA, ±1.00000A range

Programmed Source Accuracy1

±(0.029%+300pA)), ±1.00000µA range

±(0.027%+700pA), ±10.0000µA range

±(0.025%+6nA), ±100.000uA range

±(0.027%+60nA), ±1.00000mA range

±(0.035%+600nA), ±10.00000mA range

±(0.055%+6µA), ±100.000mA range

±(0.22%+570µA), ±1.00000A range

Temperature Coefficient
(0°–18°C & 28°–50°C)

±(0.1 × accuracy specification) / °C

Resistance

Range

Resolution

Test current

Accuracy

<2.00000Ω

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Source IACC+Meas.VACC

2.00000Ω

10µΩ

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Source IACC+Meas.VACC

20.0000Ω

100µΩ

100mA

±(0.1%+0.003 Ω), Normal

±(0.07%+0.001 Ω), Enhanced

200.000Ω

1mΩ

10mA

±(0.08%+0.03 Ω), Normal

±(0.05%+0.01 Ω), Enhanced

2.00000kΩ

10mΩ

1mA

±(0.07%+0.3 Ω), Normal

±(0.05%+0.1 Ω), Enhanced

20.0000kΩ

100mΩ

100µA

±(0.06%+3 Ω), Normal

±(0.04%+1 Ω), Enhanced

200.000kΩ

1Ω

10µA

±(0.07%+30 Ω), Normal

±(0.05%+10 Ω), Enhanced

2.00000MΩ

10Ω

5µA

±(0.11%+300 Ω), Normal

±(0.05%+100 Ω), Enhanced

20.0000MΩ

100Ω

0.5µA

±(0.11%+1k Ω), Normal

±(0.05%+500 Ω), Enhanced

200.000MΩ

1kΩ

100nA

±(0.66%+10k Ω), Normal

±(0.35%+5k Ω), Enhanced

>200.000M Ω

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Source IACC+Meas.VACC

Temperature Coefficient
(0°–18°C & 28°–50°C)

±(0.15 × accuracy specification)/°C

Source I mode, Manual OHMS

Total uncertainty = I source accuracy + V measure accuracy (4-wire remote sense).

Source V mode, Manual OHMS

Total uncertainty = V source accuracy + I measure accuracy (4-wire remote sense).

6-wire OHMS  mode

Available using active ohms guard and guard sense. Max. Guard Output Current: 50mA (except 1A range). Accuracy is load dependent.

Guard Output Impedance

<0.1Ω in ohms mode

System Speed

Maximum Range Change Rate

75/second

Maximum Measure Auto Range Time

40ms (fixed source) 6

Sequence reading rates7 (rdg./second) for 60Hz (50Hz)

Speed

NPLC/ Trig Origin

Measure

Source-Measure 9

TO GPIB

TO MEM.

       TO GPIB

Fast

0.01 / internal

1198 (1210)

1551 (1515)

1000 (900)

488.2

0.01 / external

1079 (1050)

1018 (990)

916 (835)

Medium

0.1 / internal

509 (433)

470 (405)

470 (410)

488.2

0.1 / external

438 (380)

409 (360)

409 (365)

Normal

1 / internal

59 (49)

58 (48)

58 (48)

488.2

1 / external

57 (48)

57 (48)

57 (47)

Speed

NPLC/ Trig Origin

Source-Measure Pass/Fail test 8,9

Measure Memory 9

TO GPIB

TO MEM.

       TO GPIB

Fast

0.01 / internal

809 (840)

165 (162)

164 (162)

488.2

0.01 / external

756 (780)

163 (160)

162 (160)

Medium

0.1 / internal

388 (343)

133 (126)

132 (126)

488.2

0.1 / external

374 (333)

131 (125)

131 (125)

Normal

1 / internal

56 (47)

44 (38)

44 (38)

488.2

1 / external

56 (47)

44 (38)

44 (38)

Single Reading Operation Rates (rdg./second) for 60Hz (50Hz)

Speed

NPLC/ Trig Origin

Source-Measure 9

Source-Measure Pass/Fail test 8,9

TO GPIB

TO GPIB

Fast(488.2)

0.01 / internal

79 (83)

79 (83)

Medium(488.2)

0.1 / internal

72 (70)

69 (70)

Normal(488.2)

1 / internal

34 (31)

35 (30)